1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates, used in making flat panel information displays. It is assumed that the thickness of the conductive thin film is much thinner than the spacing of the contact probes used to measure the sheet resistance.
Product Details
- Published:
- 05/01/2016
- Number of Pages:
- 9
- File Size:
- 1 file , 230 KB
