1.1 This test method covers a procedure for measuring in-plane lengths (including deflections) of patterned thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope.
Product Details
- Published:
- 05/01/2018
- Number of Pages:
- 14
- File Size:
- 1 file , 360 KB
